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2D inverse periodic opal structures in single crystal diamond with incorporated silicon-vacancy color centers

Year: 2017

Journal: Diam. Relat. Mat., Volume 73, MAR, page 204–209

Authors: Dai, Bing; Shu, Guoyang; Ralchenko, Victor; Bolshakov, Andrey; Sovyk, Dmitry; Khomich, Andrey; Shershulin, Vladimir; Liu, Kang; Zhao, Jiwen; Gao, Ge; Yang, Lei; Lei, Pei; Zhu, Jiaqi; Han, Jiecai

Organizations: Fundamental Research Funds for the Central Universities [HIT.NSRIF.2015040]; National Key Laboratory Funds [914C490106150C49001]; International Science & Technology Cooperation Program of China [2015DFR50300]

Keywords: Single crystal diamond; MPCVD; Opal structure; Silicon-vacancy center; Photonic crystal

Well-ordered opal-diamond composite and inverted opal structure in single crystal (SC) diamond have been prepared by microwave plasma CVD. The process is based on epitaxial diamond growth through a monolayer of densely packed SiO2 spheres placed on a (100) HPHT diamond substrate. Finally, the opal monolayer with 600 nm sphere diameter was completely embedded in SC CVD diamond forming a new type of ordered diamond composite. In addition, the inverse opal structures (air cavities in diamond) were produced by SiO2 etching. The XRD analysis confirmed the single crystal nature of the deposit. The photoluminescence spectrum exhibits a strong peak at 738 nm wavelength of silicon-vacancy defects in diamond, indicating Si doping during the CVD process. The optical properties of the diamond structures were evaluated also with Raman spectroscopy and optical reflection spectrometry. The developed epitaxy-through-mask approach is considered as a potential strategy to fabricate multilayered (3D) SC diamond photonic crystals. (C) 2016 Elsevier B.V. All rights reserved.