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    MITIGATION OF CORROSION CHALLENGES FOR BARRIER FILMS AT ADVANCED NODES

    Year: 2016

    Authors: Sagi, KV; Babu, SV

    This work addresses the corrosion and galvanic corrosion challenges that can arise from the use of various novel barrier materials Ru/TiN, Co and Mn during barrier CMP in the back end of the line (BEOL) interconnects for advanced nodes.