Year: 2017
Journal: Beilstein J. Nanotechnol., Volume 8, APR 26, page 933–942
Authors: Christian, Paul; Coclite, Anna Maria
Organizations: Austrian Science Fund (FWF) [P26993]
Keywords: EGDMA; iCVD; in situ; PFDA; spectroscopic ellipsometry; temperature dependent; X-ray diffraction