Year: 2019
Journal: Micromachines, Volume 10, OCT
Authors: Li, Yue; Yang, Guang; Wu, Qihui; Cheng, Jun; Hu, Zhichao
Organizations: Natural Science Foundation of Fujian Province of ChinaNatural Science Foundation of Fujian Province [2017J01700]; Key Project of Fujian Province of China [2017H0025]
Keywords: optical thin films; magnetron sputtering; nanoscale antisticking layer; release strength; surface roughness