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Design of a Chemoresistive Sensor Array for Potential Smart Agriculture Applications

Year: 2023

Journal: 2023 Smart Systems Integration Conference and Exhibition (SSI), 2023-03

Authors: Pachiu, C.; Simionescu, O.; Serban, B.; Parvulescu, C.; Marinescu, R.; Dumbravescu, N.; Negoita, F.; Popa, R.; Buiu, O.; Serbanescu, M.; Pristavu, Gh.; Brezeanu, Gh.

Keywords: Humidity; chemoresistive sensors; fluorination; Ink jet printing; Intelligent sensors; nacrocrystalline graphene; Plasmas; readout circuitry; Smart agriculture; Standards; System integration

The present paper presents the current achievements of a joint, multidisciplinary research group in developing a set of smart chemoresistive sensors. Based on the experience gathered in developing and testing relative humidity and alcohol chemoresistive sensors, our main objective is developing a series of chemoresistive smart sensors, that could be manufactured employing standard CMOS tools, in conjunction with the direct, inkjet printing like techniques. The results presented here focus on the optimization of nanocrystalline CVD based graphene layers, through exposure to different fluorine based plasmas and the structural changes induced and with relevance for their further use as chemoresistve sensors.