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Dewetting of Patterned Silicon Substrates Leading to a Selective Deposition of Micellar-Based Nanoparticles

Year: 2012

Journal: J. Phys. Chem. C, 2012, 116 (19), 10743-10752, 20131009

Authors: A. Riskin, C. De Dobbelaere, L. Shan, H. G. Boyen, J. D'haen, A. Hardy, M. K. Van Bael

Organizations: Inorganic and Physical Chemistry, Institute for Materials Research, Hasselt University, Agoralaan Building D, 3590 Diepenbeek, Belgium; Imec vzw Division IMOMEC, Wetenschapspark 1, 3590 Diepenbeek, Belgium; Electrical and Physical Characterization, Institute for Materials Research, Hasselt University, Wetenschapspark 1, 3590 Diepenbeek, Belgium

We have applied soft lithography for the indirect patterning of micellar poly(styrene-b-2-vinyl pyridine) diblock copolymers loaded with gold chloric acid with a pattern width below a micrometer. A combination of physical and chemical heterogeneities on the substrate induced a selective deposition of the micelles in between the relief structures without the need for additional liftoff or annealing steps. Micelle size, dip coating speed, and height of the relief pattern were identified as important parameters to achieve a successful selective deposition. Finally, a single layer of patterned gold nanoparticles was formed inside the micropattern using an oxygen plasma treatment.