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Fabrication of nanocluster silicon surface with electric discharge and the application in desorption/ionization on silicon-mass spectrometry

Year: 2010

Journal: Lab on a Chip, 2010, 10, 1689-1695, 20111221

Authors: Niina M. Suni,a Markus Haapala,a Elina Färm,b Emma Härkönen,b Mikko Ritala,b Lauri Sainiemi,cd Sami Franssila,cd Tapio Kotiaho*ae and Risto Kostiainen*a

Organizations: a Division of Pharmaceutical Chemistry, University of Helsinki, P. O. Box 56, FI-00014, Finland, b Laboratory of Inorganic Chemistry, Department of Chemistry, University of Helsinki, P. O. Box 55, FI-00014, Finland, c Department of Micro and Nanosciences, Aalto University School of Science and Technology, P. O. Box 13500, FI-00076 Aalto, Finland, d Department of Materials Science and Engineering, Aalto University School of Science and Technology, P. O. Box 16200, FI-00076 Aalto, Finland, e Laboratory of Analytical Chemistry, Department of Chemistry, University of Helsinki, P. O. Box 55, FI-00014, Finland

This study presents a new, simple, and low-cost technique to fabricate a nanocluster silicon (NCSi) surface on planar silicon using a micro-scale direct current (DC) discharge under ambient conditions. The method requires no masks, chemicals, vacuum environment, or laser, but only a high-voltage supply. The NCSi surfaces, characterized by scanning electron microscopy (SEM) and energy dispersive X-ray (EDX) spectroscopy, consist of oxidized silicon nanoclusters 50–200 nm in diameter, likely formed by melting due to high temperatures in the discharge. The minimum size of the NCSi spot is determined by the size of the discharge tip ([similar]90 µm). Arbitrary NCSi areas can be produced on a silicon wafer by moving the discharge needle on the surface with the help of a computer-controlled xyz stage. NCSi surfaces can also be formed on three-dimensional (3D) surfaces, as demonstrated with silicon micropillars. NCSi surfaces can be used, for example, in various analytical applications. In this study, we demonstrate their use as sample plates in the analysis of drugs and peptides with desorption/ionization on silicon-mass spectrometry (DIOS-MS).