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Fabrication of planar polymer waveguides for evanescent-wave sensing in aqueous environments

Year: 2010

Journal: Microelectronic Engineering, Volume 87, Issue 1, January 2010, Pages 56-61, 20111221

Authors: Bjorn Agnarsson a , Jennifer Halldorsson a , Nina Arn?nnsdottir a , Saevar Ingthorsson b , Thorarinn Gudjonsson b , Kristjan Leosson a

Organizations: a Department of Physics, Science Institute, University of Iceland, Dunhagi 3, IS-107 Reykjavik, Iceland, b Stem Cell Biology Unit, Department of Anatomy, Biomedical Center, University of Iceland and Department of Laboratory Hematology, Landspitali-University Hospital (K-building), IS-101 Reykjavik, Iceland

We present a detailed account of processing issues related to fabrication of optical waveguide sensors intended for evanescent-wave sensing in aqueous solutions or surface-bound fluorescence excitation in biological samples. The waveguides consist of a polymer layer on top of a fluoropolymer (Cytop) cladding. The fluoropolymer is closely index-matched to water, providing a symmetric cladding environment which simplifies optical excitation and provides tunability in penetration depth not available with other evanescent-wave techniques. We present methods of controlling the wettability of the fluoropolymer surface and improving adhesion to the core waveguide layer. Furthermore, we demonstrate the application of the waveguide structure to fluorescence imaging of cultured cells.