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    Generation of Surface Plasmon Resonance and Lossy Mode Resonance by thermal treatment of ITO thin-films

    Year: 2015

    Journal: OPTICS AND LASER TECHNOLOGY, Vol. 69, p 1-7, 20170208

    Authors: Del Villar, I.; Zamarreno, C. R.; Hernaez, M.; Sanchez, P.; Arregui, F. J.; Matias, I. R.

    Organizations: Univ Publ Navarra, Elect & Elect Engn Dept, Pamplona 31006, NA, Spain

    Silicon wafers coated with Indium Tin Oxide (ITO) by application of sputtering technique have been characterized after different post-annealing techniques, showing that this last factor is critical for the quality of the thin-film and for the creation and tuning of both surface plasmon resonances and lossy mode resonances. By adequate selection of the ITO thin-film thickness both resonances can be tracked in the same spectrum, which can be used in sensor and optical communications fields. (C) 2014 Elsevier Ltd. All rights reserved.