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    Layer-by-layer deposition of colloidal semiconductor nanocrystals for integration of infrared photon-detectors on 3D topography

    Year: 2011

    Journal: Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 16th International, 2011, 1749-1752, 20131009

    Authors: J. Wei, Y. Gao, A. J. Houtepen, G. Pandraud, P. M. Sarro

    Organizations: DIMES/Delft University of Technology, Delft, Netherlands; Chemical Engineering/Delft University of Technology, Delft, Netherlands; Kavli Institute of Nanoscience/Delft University of Technology, Delft, Netherlands

    This paper presents photosensitive colloidal nanocrystal films for the integration of photon-detectors on 3D topography surfaces. Silicon wafers with anisotropically etched cavities are used as substrates, and gold electrodes are patterned across the 3D surface. A layer-by-layer dip-coating method is used to deposit semi-conductive PbSe colloidal nanocrystals from solution, in order to form infrared photon-detectors on the tapered surfaces. An integrated device capable of detecting the angle of the incoming infrared illumination is implemented to demonstrate the potential of this technology.