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    Novel hybrid material for microfluidic devices

    Year: 2008

    Journal: Sensors and Actuators B: Chemical, Volume 132, Issue 2, 16 June 2008, Pages 397-403, 20111221

    Authors: Susanna Aura, Tiina Sikanen, Tapio Kotiaho, and Sami Franssila

    Organizations: Micro and Nanosciences Laboratory, Helsinki University of Technology, Espoo, Finland, Laboratory of Analytical Chemistry, Department of Chemistry, University of Helsinki, Helsinki, Finland, Division of Pharmaceutical Chemistry, Faculty of Pharmacy, University of Helsinki, Helsinki, Finland

    We present a fabrication process for ORMOCER microfluidic devices. Organically modified ceramics (ORMOCER®s) are a new interesting group of materials, which provide fast and easy processing and favorable surface properties. In patterning ORMOCER behaves as negative photoresist and both UV-lithography and UV-embossing are used to fabricate structures. Oxygen plasma-treated PDMS cover is irreversible bonded to ORMOCER channel wafer for capillary electrophoresis (CE) chip fabrication. Electro-osmotic mobility is measured using ORMOCER/PDMS microchannels with different buffer conditions and found somewhat similar to glass. Contact angle measurements also indicate glass-like behavior in surface properties. Peptide separations are demonstrated using ORMOCER/PDMS CE chip. ORMOCER/ORMOCER bonding for single material fluidic devices with integrated fabrication of fluidic inlets promises more applications for this novel material.