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    Part scaling and mechanics of thin part self-assembly in the fludic phase

    Year: 2011

    Journal: Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference, 2011, 364-367, 20131009

    Authors: Kwang Soon Park, Xugang Xiong, Rajashree Baskaran, Karl F Böhringer

    Organizations: Department of Electrical Engineering, University of Washington, Seattle, USA; Components Research, Intel Corporation, USA

    This paper presents an experimental and theoretical study of previously demonstrated high yield self-assembly processes using surface programmable template and specific surface Faraday waves. Here we focus on the combined effect of substrate tilting angle and part size. For 1×1, 3×3 and 5×5 mm2 parts of 100 μm thickness, the maximum substrate tilting angles for effective assembly are experimentally determined and the surface tension induced torques are calculated based on a newly developed model.