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    Termination of diamond surfaces with hydrogen, oxygen and fluorine using a small, simple plasma gun

    Year: 2010

    Journal: Diamond and Related Materials Volume 19, Issue 4, April 2010, Pages 324-328, 20111221

    Authors: M.C. Salvadori a, W.W.R. Araújo a , F.S. Teixeira b , M. Cattani a , A. Pasquarelli c , E.M. Oks d , I.G. Brown e

    Organizations: a Institute of Physics, University of São Paulo, São Paulo, C.P. 66318, CEP 05315-970, São Paulo, Brazil, b Polytechnic School, University of São Paulo, São Paulo, SP Brazil, c University of Ulm, Department of Electron Devices & Circuits, D-89069 Ulm, Germany, d High Current Electronics Institute, Russian Academy of Sciences, Tomsk 634055, Russia, e Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA

    We have formed and characterized polycrystalline diamond films with surfaces having hydrogen terminations, oxygen terminations, or fluorine terminations, using a small, simple and novel plasma gun to bombard the diamond surface, formed by plasma assisted CVD in a prior step, with ions of the wanted terminating species. The potential differences between surface regions with different terminations were measured by Kelvin Force Microscopy (KFM). The highest potential occurred for oxygen termination regions and the lowest for fluorine. The potential difference between regions with oxygen terminations and hydrogen terminations was about 80 mV, and between regions with hydrogen terminations and fluorine terminations about 150 mV. Regions with different terminations were identified and imaged using the secondary electron signal provided by scanning electron microscopy (SEM), since this signal presents contrast for surfaces with different electrical properties. The wettability of the surfaces with different terminations was evaluated, measuring contact angles. The sample with oxygen termination was the most hydrophilic, with a contact angle of 75°; hydrogen-terminated regions with 83°, and fluorine regions 93°, the most hydrophobic sample.