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    Virtual separation approach to study porous ultra-thin films by combined spectroscopic ellipsometry and quartz crystal microbalance methods

    Year: 2011

    Journal: Thin Solid Films, Volume 519, Issue 9, 28 February 2011, Pages 2772-2776, 20110525

    Authors: Rodenhausen K.B. 1 2, Schubert M. 3 4

    Last authors: M. Schubert

    Organizations: a Department of Chemical and Biomolecular Engineering, University of Nebraska-Lincoln, USA b Nebraska Center for Materials and Nanoscience, University of Nebraska-Lincoln, USA c Department of Electrical Engineering, University of Nebraska-Lincoln, USA

    Country: USA, US, United States, United States of America, America

    Spectroscopic ellipsometry (SE) and quartz crystal microbalance with dissipation (QCM -D) techniques have been extensively used as independent surface characterization tools to monitor in-situ thin film formation. They provide different information for ultra-thin films because QCM -D is sensitive to the solvent content while SE is not. For using these two techniques in tandem, we present a virtual separation approach to enable the determination of both ultra-thin film thickness and porosity. Assumptions for the intrinsic molecular polarizability (index of refraction no) and density (ρo) of the organic adsorbent must be made, and the consequences for these parameters' values are discussed.