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    Aerosol jet printing of piezoelectric surface acoustic wave thermometer

    Year: 2023

    Journal: Microsystems & Nanoengineering, Volume 9, 2023-05-04

    Authors: McKibben, Nicholas; Ryel, Blake; Manzi, Jacob; Muramutsa, Florent; Daw, Joshua; Subbaraman, Harish; Estrada, David; Deng, Zhangxian

    Keywords: Electrical and electronic engineering; Electronic properties and materials

    Surface acoustic wave (SAW) devices are a subclass of micro-electromechanical systems (MEMS) that generate an acoustic emission when electrically stimulated. These transducers also work as detectors, converting surface strain into readable electrical signals. Physical properties of the generated SAW are material dependent and influenced by external factors like temperature. By monitoring temperature-dependent scattering parameters a SAW device can function as a thermometer to elucidate substrate temperature. Traditional fabrication of SAW sensors requires labor- and cost- intensive subtractive processes that produce large volumes of hazardous waste. This study utilizes an innovative aerosol jet printer to directly write consistent, high-resolution, silver comb electrodes onto a Y-cut LiNbO3 substrate. The printed, two-port, 20 MHz SAW sensor exhibited excellent linearity and repeatability while being verified as a thermometer from 25 to 200 ∘C. Sensitivities of the printed SAW thermometer are $$-96.9times 1{0{}^{-6}}^{circ }$$C−1 and $$-92.0times 1{0{}^{-6}}^{circ }$$C−1 when operating in pulse-echo mode and pulse-receiver mode, respectively. These results highlight a repeatable path to the additive fabrication of compact high-frequency SAW thermometers.
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