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    Progress and control in development of single layer graphene membranes

    Year: 2020

    Journal: Vacuum, Volume 175, MAY

    Authors: Tincu, B.; Avram, M.; Avram, A.; Tutunaru, O.; Tucureanu, V.; Matei, A.; Burinaru, T.; Comanescu, F.; Demetrescu, I.

    Organizations: Operational Programme Human Capital of the Ministry of European Funds [51668/09.07.2019, 124705]; UEFISCDIConsiliul National al Cercetarii Stiintifice (CNCS)Unitatea Executiva pentru Finantarea Invatamantului Superior, a Cercetarii, Dezvoltarii si Inovarii (UEFISCDI) [PN-III-P1-1.2-PCCDI-2017-0214, 3PCCDI/2018]

    Keywords: Si/SiO2 holes; Suspended single layer graphene; Chemical vapor deposition; Scanning electron microscopy

    Recent approaches in graphene transfer on different substrates and nanostructured surfaces have opened up new potential applications such as: pressure sensors, separation membranes, electrochemical sensors. Graphene single layer is a promising membrane material, due to chemically inert, large specific surface area with hydrophobic property. In this work, single layer graphene have been synthesized by CVD on copper catalyst and transferred by three different wet chemical transfer methods on Si/SiO2 holes of approximatively 7 mu m diameter. The novelty of this study is the introduction of a vacuum step to help remove liquids from underneath the graphene layer while maintaining the structural integrity of the membrane. Raman spectroscopy was performed to analyze the number of layers and the quality of graphene. The morphology of the graphene transferred on the holes were examined using scanning electron microscopy (SEM).
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