- All QSense sensors
- QSense Explorer
- QSense Analyzer
- QSense Pro
The holder is open on both sides of the sensor to prevent uneven pressure changes. A common application is Atomic Layer Deposition (ALD).
The holder is open on both sides of the sensor to prevent uneven pressure changes. A common application is Atomic Layer Deposition (ALD).
General specifications | |
Compatibility | Compatible with all QSense sensors, QSense Explorer, Analyzer and Pro |
Maximum pressure | No limit |
Type of measurements | Gas measurements in vacuum and high pressure chambers |
Maximum temperature | 250 °C |
Materials exposed to the liquid | Stainless steel (holder and ring), Macor (holder), aluminum (holder) and Kapton (cable) |
Dimensions | Height: 5 mm; Width: 24 mm; Depth: 32 mm |
Length of cables | Electronics unit to vacuum/high pressure chamber: 80 cm. Vacuum/high pressure chamber to ALD holder: 1 m |
Other |
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Customer installation/adaption required. | |
Delivered with 2 cables: one to connect the ALD holder to the inside of the vacuum or high pressure chamber and one to connect the chamber to the QCM-D electronics unit. | |
Screw holes to enable mounting in vacuum/high pressure chamber. |